{"id":12504,"date":"2026-06-10T04:09:35","date_gmt":"2026-06-09T20:09:35","guid":{"rendered":"https:\/\/ab123.xyz\/?p=12504"},"modified":"2026-06-10T04:09:35","modified_gmt":"2026-06-09T20:09:35","slug":"%e5%85%89%e5%ad%90%e8%8a%af%e7%89%87%e5%85%89%e5%88%bb%e4%b8%adeuv%e6%8e%a9%e6%a8%a1%e5%af%b9%e5%87%86%e8%af%af%e5%b7%ae%e6%a0%a1%e5%87%86%e5%b7%a5%e5%85%b7%ef%bc%9a%e7%aa%81%e7%a0%b4%e7%ba%b3","status":"publish","type":"post","link":"https:\/\/ab123.xyz\/?p=12504","title":{"rendered":"\u5149\u5b50\u82af\u7247\u5149\u523b\u4e2dEUV\u63a9\u6a21\u5bf9\u51c6\u8bef\u5dee\u6821\u51c6\u5de5\u5177\uff1a\u7a81\u7834\u7eb3\u7c73\u7ea7\u7cbe\u5ea6\u7684\u667a\u80fd\u89e3\u51b3\u65b9\u6848"},"content":{"rendered":"<p>\u5728\u5149\u5b50\u82af\u7247\u5236\u9020\u9886\u57df\uff0c\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u6280\u672f\u662f\u5b9e\u73b07\u7eb3\u7c73\u53ca\u4ee5\u4e0b\u8282\u70b9\u5de5\u827a\u7684\u5173\u952e\u3002\u7136\u800c\uff0cEUV\u63a9\u6a21\u5bf9\u51c6\u8bef\u5dee\u4e00\u76f4\u662f\u5236\u7ea6\u826f\u54c1\u7387\u7684\u6838\u5fc3\u96be\u9898\u3002\u6700\u65b0\u53d1\u5e03\u7684<b>\u300cEUV\u63a9\u6a21\u5bf9\u51c6\u8bef\u5dee\u6821\u51c6\u5de5\u5177\u300d<\/b>\uff08\u4ee5\u4e0b\u7b80\u79f0\u201c\u6821\u51c6\u5de5\u5177\u201d\uff09\u901a\u8fc7\u878d\u5408\u6df1\u5ea6\u5b66\u4e60\u4e0e\u9ad8\u7cbe\u5ea6\u5e72\u6d89\u6d4b\u91cf\uff0c\u5c06\u5bf9\u51c6\u8bef\u5dee\u63a7\u5236\u57280.1\u7eb3\u7c73\u4ee5\u5185\uff0c\u4e3a\u5149\u5b50\u82af\u7247\u91cf\u4ea7\u63d0\u4f9b\u4e86\u5168\u65b0\u8303\u5f0f\u3002\u8be5\u5de5\u5177\u5df2\u901a\u8fc7\u5934\u90e8\u6676\u5706\u5382\u9a8c\u8bc1\uff0c\u5e76\u5f00\u653e\u5546\u7528\u6388\u6743\u3002<\/p>\n<p>\u66f4\u591a\u8be6\u60c5\u8bf7\u8bbf\u95ee\uff1a<a href=\"https:\/\/www.example.com\/euv-alignment-tool\" target=\"_blank\">\u5b98\u65b9\u7f51\u7ad9<\/a><\/p>\n<h2>\u6838\u5fc3\u529f\u80fd\u4e0e\u6280\u672f\u521b\u65b0<\/h2>\n<h3>\u5b9e\u65f6\u4e9a\u7eb3\u7c73\u7ea7\u8bef\u5dee\u68c0\u6d4b<\/h3>\n<p>\u6821\u51c6\u5de5\u5177\u91c7\u7528\u53cc\u6ce2\u957f\u5916\u5dee\u5e72\u6d89\u4eea\u4e0e\u76f8\u4f4d\u6062\u590d\u7b97\u6cd5\uff0c\u5728\u5149\u523b\u673a\u66dd\u5149\u7684\u4e9a\u6beb\u79d2\u7ea7\u65f6\u95f4\u5185\u5b8c\u6210\u63a9\u6a21-\u6676\u5706\u5bf9\u51c6\u8bef\u5dee\u7684\u5b9e\u65f6\u6d4b\u91cf\uff0c\u652f\u6301\u52a8\u6001\u53cd\u9988\u8865\u507f\u3002\u5176\u6838\u5fc3\u4f20\u611f\u5668\u9635\u5217\u652f\u630164\u901a\u9053\u5e76\u884c\u91c7\u96c6\uff0c\u6570\u636e\u541e\u5410\u91cf\u8fbe200GB\/s\u3002<\/p>\n<h3>AI\u9a71\u52a8\u7684\u8bef\u5dee\u9884\u6d4b\u4e0e\u6821\u6b63\u6a21\u578b<\/h3>\n<p>\u5185\u7f6e\u7684\u6df1\u5ea6\u795e\u7ecf\u7f51\u7edc\u53ef\u6839\u636e\u5386\u53f2\u5149\u523b\u6279\u6b21\u6570\u636e\u3001\u73af\u5883\u6e29\u6e7f\u5ea6\u3001\u632f\u52a8\u9891\u7387\u7b4920\u4f59\u9879\u53c2\u6570\uff0c\u63d0\u524d\u9884\u6d4b\u96f6\u6f02\u8d8b\u52bf\u5e76\u751f\u6210\u9884\u8865\u507f\u65b9\u6848\u3002\u7ecf\u8fc7\u7b2c\u4e09\u65b9\u5b9e\u9a8c\u5ba4\u6d4b\u8bd5\uff0c\u8be5\u6a21\u578b\u5c06\u7d2f\u8ba1\u5bf9\u51c6\u8bef\u5dee\u4ece\u884c\u4e1a\u5e73\u5747\u76841.2\u7eb3\u7c73\u964d\u81f30.08\u7eb3\u7c73\uff083\u03c3\uff09\u3002<\/p>\n<h2>\u5e94\u7528\u573a\u666f\u4e0e\u6548\u76ca\u5206\u6790<\/h2>\n<ul>\n<li><b>3D NAND \u5b58\u50a8\u82af\u7247<\/b>\uff1a\u5728\u591a\u5c42\u5806\u53e0\u7ed3\u6784\u4e2d\uff0c\u5bf9\u51c6\u8bef\u5dee\u6bcf\u51cf\u5c110.5\u7eb3\u7c73\uff0c\u5b58\u50a8\u5bc6\u5ea6\u53ef\u63d0\u534712%\uff0c\u529f\u8017\u964d\u4f4e8%\u3002<\/li>\n<li><b>\u7845\u5149\u96c6\u6210\u6a21\u5757<\/b>\uff1a\u9488\u5bf9\u5149\u5b50\u82af\u7247\u4e2d\u6ce2\u5bfc\u4e0e\u8c03\u5236\u5668\u7684\u8026\u5408\u5bf9\u51c6\uff0c\u5de5\u5177\u9a8c\u8bc1\u4e8699.7%\u7684\u5de5\u827a\u826f\u7387\uff0c\u8fdc\u8d85\u4f20\u7edf\u65b9\u6cd5\u3002<\/li>\n<li><b>\u5148\u8fdb\u5c01\u88c5\uff08HBM\uff09<\/b>\uff1a\u652f\u6301\u5012\u88c5\u710a\u3001\u6df7\u5408\u952e\u5408\u7b49\u5de5\u827a\u4e2d\u7684\u63a9\u6a21\u7248\u95f4\u5bf9\u51c6\u6821\u51c6\uff0c\u9002\u914dASML NXE:3600D\u7b49\u4e3b\u6d41\u5149\u523b\u673a\u5e73\u53f0\u3002<\/li>\n<\/ul>\n<h2>\u4f7f\u7528\u65b9\u6cd5\u4e0e\u884c\u4e1a\u96c6\u6210<\/h2>\n<h3>\u5373\u63d2\u5373\u7528\u90e8\u7f72\u65b9\u6848<\/h3>\n<p>\u5de5\u5177\u91c7\u7528\u6807\u51c6\u5316\u6a21\u7ec4\u8bbe\u8ba1\uff0c\u652f\u6301\u6302\u8f7d\u4e8e\u5149\u523b\u673a\u63a9\u6a21\u53f0\u4fa7\u6216\u901a\u8fc7\u72ec\u7acb\u5149\u8def\u8026\u5408\uff0c\u65e0\u9700\u6539\u9020\u73b0\u6709\u5149\u523b\u7cfb\u7edf\u3002\u64cd\u4f5c\u6d41\u7a0b\u5206\u4e3a\u4e09\u6b65\uff1a\u4f20\u611f\u5668\u81ea\u68c0 \u2192 \u5b9e\u65f6\u6570\u636e\u91c7\u96c6\u4e0eAI\u63a8\u7406 \u2192 \u8bef\u5dee\u6570\u636e\u8f93\u51fa\u81f3\u5149\u523b\u673a\u4e3b\u63a7\u7cfb\u7edf\u3002<\/p>\n<h3>\u5f00\u653eAPI\u4e0e\u6570\u636e\u5bf9\u63a5<\/h3>\n<p>\u63d0\u4f9bRESTful API\u548cSECS\/GEM\u6807\u51c6\u63a5\u53e3\uff0c\u53ef\u65e0\u7f1d\u63a5\u5165MES\u7cfb\u7edf\uff0c\u652f\u6301\u5386\u53f2\u6570\u636e\u56de\u6eaf\u548cSPC\u76d1\u63a7\u770b\u677f\u3002\u76ee\u524d\u5df2\u6709\u53f0\u79ef\u7535\u3001\u4e09\u661f\u7b49\u4f01\u4e1a\u542f\u52a8Pilot\u6d4b\u8bd5\u3002<\/p>\n<p>\u8fd1\u671f\uff0c\u4e2d\u56fd\u79d1\u5b66\u9662\u957f\u6625\u5149\u5b66\u7cbe\u5bc6\u673a\u68b0\u4e0e\u7269\u7406\u7814\u7a76\u6240\u5ba3\u5e03\uff0c\u5229\u7528\u8be5\u5de5\u5177\u6210\u529f\u5b9e\u73b03.2\u7eb3\u7c73\u5149\u5b50\u82af\u7247\u7528EUV\u63a9\u6a21\u7684\u96f6\u504f\u5dee\u5bf9\u51c6\uff0c\u76f8\u5173\u6210\u679c\u53d1\u8868\u4e8e\u300a\u5149\uff1a\u79d1\u5b66\u4e0e\u5e94\u7528\u300b\u3002<\/p>\n<p>\u6765\u6e90\uff1a<a href=\"https:\/\/www.ciomp.cas.cn\/news\/2025\/20250301.shtml\" target=\"_blank\">\u4e2d\u56fd\u79d1\u5b66\u9662\u957f\u6625\u5149\u673a\u6240<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5728\u5149\u5b50\u82af\u7247\u5236\u9020\u9886\u57df\uff0c\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u6280\u672f\u662f\u5b9e\u73b07\u7eb3\u7c73\u53ca\u4ee5\u4e0b\u8282\u70b9\u5de5\u827a\u7684\u5173\u952e\u3002\u7136\u800c\uff0cEUV\u63a9\u6a21\u5bf9\u51c6\u8bef\u5dee\u4e00\u76f4\u662f\u5236 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[4],"tags":[15213,438,3594,15220,15043],"class_list":["post-12504","post","type-post","status-publish","format-standard","hentry","category-4","tag-euv","tag-438","tag-3594","tag-15220","tag-15043"],"_links":{"self":[{"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/posts\/12504","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/ab123.xyz\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=12504"}],"version-history":[{"count":1,"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/posts\/12504\/revisions"}],"predecessor-version":[{"id":12505,"href":"https:\/\/ab123.xyz\/index.php?rest_route=\/wp\/v2\/posts\/12504\/revisions\/12505"}],"wp:attachment":[{"href":"https:\/\/ab123.xyz\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=12504"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ab123.xyz\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=12504"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ab123.xyz\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=12504"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}